Document Type and Number:
Japanese Patent JPS5117303
Kind Code:
B1
Abstract:
An interferometer for measuring distances along coordinate axes including a pair of stages each movable in a direction along one of a pair of perpendicular co-ordinate axes, each carrying a mirror which travels along said axis. Each of said mirrors is respectively in the optical path along said axis of an associatedinterferometer means, each of the two interferometer means being fed by a common light source, preferably a laser, and means associated with at least one of said interferometer means to introduce corrections for mechanical play in the system and corrections for relative rotation of the states about the intersection of the co-ordinate axes.
Application Number:
JP12256770A
Publication Date:
June 01, 1976
Filing Date:
December 30, 1970
Export Citation:
International Classes:
G01B9/02; G01B11/24; G01B21/20; G02B5/04; (IPC1-7): G01B9/02; G01B11/02; G01B11/24; G02B5/04