- Patent JPS5117666

Document Type and Number:

Japanese Patent JPS5117666

Kind Code:

A

Inventors:

YAMAMOTO HIROSHI
ISHIZAKA AKITOSHI
IWATA SEIICHI

Application Number:

JP8904374A

Publication Date:

February 12, 1976

Filing Date:

August 05, 1974

Export Citation:

Assignee:

HITACHI LTD

International Classes:

H01L21/60; H01L21/603; H01L21/607; (IPC1-7): H01L21/603; H01L21/607

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