Document Type and Number:
Japanese Patent JPS5124182
Kind Code:
U
Application Number:
JP9628575U
Publication Date:
February 21, 1976
Filing Date:
July 12, 1975
Export Citation:
International Classes:
H01J40/02; G01J3/00; G01N21/01; G01N23/00; G01T1/10; (IPC1-7): G01T1/10; G01J3/00; G01N23/00; H01J39/00