Login| Sign Up| Help| Contact|

Patent Searching and Data


Document Type and Number:
Japanese Patent JPS5129234
Kind Code:
U
Application Number:
JP10283974U
Publication Date:
March 03, 1976
Filing Date:
August 27, 1974
Export Citation:
Click for automatic bibliography generation   Help
International Classes:
H01H51/06; H01H50/24; H01H50/56; (IPC1-7): H01H50/56
Domestic Patent References:
JPS398980Y1
JP49073734B



 
Previous Patent: JPS5129233

Next Patent: ECR-TYPE PLASMA PROCESSING APPARATUS