Document Type and Number:
Japanese Patent JPS513182
Kind Code:
A
Inventors:
TOKUDA KAZUO
TSUGITA MASATSUNE
RYONO KENICHIRO
TSUGITA MASATSUNE
RYONO KENICHIRO
Application Number:
JP7182674A
Publication Date:
January 12, 1976
Filing Date:
June 25, 1974
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L23/52; H01L21/3205; H01L21/441; H01L27/04; H01L29/41; (IPC1-7): H01L21/441; H01L27/04
Domestic Patent References:
| JPS4919632A | 1974-02-21 |
Next Patent: JPH0513183