Document Type and Number:
Japanese Patent JPS5134696
Kind Code:
Y2
Application Number:
JP318371U
Publication Date:
August 27, 1976
Filing Date:
January 26, 1971
Export Citation:
International Classes:
G01R17/12; G01L1/18; G01L9/04; G01R17/18; H01L29/84; (IPC1-7): H01L29/84; G01L1/18