Document Type and Number:
Japanese Patent JPS5135063
Kind Code:
B2
Application Number:
JP12413873A
Publication Date:
September 30, 1976
Filing Date:
November 05, 1973
Export Citation:
International Classes:
A47L25/08; D06C11/00
Previous Patent: JPS5135062
Next Patent: SEMICONDUCTOR MANUFACTURE DEVICE, ITS CONTROL METHOD AND CONTROLLER
Next Patent: SEMICONDUCTOR MANUFACTURE DEVICE, ITS CONTROL METHOD AND CONTROLLER