Document Type and Number:
Japanese Patent JPS5140787
Kind Code:
B2
Application Number:
JP7122271A
Publication Date:
November 05, 1976
Filing Date:
September 16, 1971
Export Citation:
International Classes:
H01L21/8247; G11C11/34; H01L29/78; H01L29/788; H01L29/792; (IPC1-7): H01L29/78; G11C11/34