Document Type and Number:
Japanese Patent JPS5147997
Kind Code:
Y2
Application Number:
JP4092673U
Publication Date:
November 18, 1976
Filing Date:
April 06, 1973
Export Citation:
International Classes:
F15B15/28; F15B15/20; G08B9/00; H01L31/00; H01L31/12; (IPC1-7): F15B15/20; G08B9/00; H01L31/12