Document Type and Number:
Japanese Patent JPS5148277
Kind Code:
A
Inventors:
NOTO HARUMI
SONODA SANENOBU
SONODA SANENOBU
Application Number:
JP12291174A
Publication Date:
April 24, 1976
Filing Date:
October 23, 1974
Export Citation:
Assignee:
NITTO ELECTRIC IND CO
International Classes:
H01L21/52; H01L23/02; H01L23/12; (IPC1-7): H01L23/02; H01L23/12
Domestic Patent References:
| JP42005977A |