Document Type and Number:
Japanese Patent JPS5156184
Kind Code:
A
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Inventors:
OOTSUKI OSAMU
TANIGAWA KUNIHIRO
TANIGAWA KUNIHIRO
Application Number:
JP13067874A
Publication Date:
May 17, 1976
Filing Date:
November 12, 1974
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L29/762; G11C11/34; H01L21/339; H01L29/78; (IPC1-7): G11C11/34; H01L29/78