- Patent JPS5159280

Document Type and Number:

Japanese Patent JPS5159280

Kind Code:

A

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Inventors:

YOKOYAMA NAOKI
ISHIKAWA HAJIME
FUKUDA MASUMI

Application Number:

JP13387974A

Publication Date:

May 24, 1976

Filing Date:

November 20, 1974

Export Citation:

Assignee:

FUJITSU LTD

International Classes:

H01L29/80; H01L21/338; H01L29/47; H01L29/812; H01L29/872; (IPC1-7): H01L29/56; H01L29/80

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