Document Type and Number:
Japanese Patent JPS5161268
Kind Code:
A
Inventors:
SAKAI TSUTOMU
Application Number:
JP13653674A
Publication Date:
May 27, 1976
Filing Date:
November 26, 1974
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
G01R31/26; H01L21/66; (IPC1-7): G01R31/26; H01L21/66