Document Type and Number:
Japanese Patent JPS5174906
Kind Code:
A
Abstract:
In an apparatus for crucible-free zone melting, a device for supporting a lower end of the crystalline rod of semiconductor which has a junction with a seed crystal characterized by the support device being formed by a plurality of sections or parts which are moveable relative to each other from a first position spaced or retracted from the seed crystal and the lower end of the rod to enable melting the rod adjacent to the junction and a second position forming a container surrounding the seed crystal and the lower end of the rod for receiving a supporting or stabilizing medium which dampens or prevents vibrations from being applied to the lower end of the rod and the junction. The sections are held in the second position by a holding means which may either be electromagnetic or mechanical.
Inventors:
UORUFUGANGU KERAA
GERUHARUTO BAROSUKII
GERUHARUTO SHUROETERU
GERUHARUTO BAROSUKII
GERUHARUTO SHUROETERU
Application Number:
JP13918075A
Publication Date:
June 29, 1976
Filing Date:
November 19, 1975
Export Citation:
Assignee:
SIEMENS AG
International Classes:
C30B13/00; C30B13/28; C30B13/32; H01L21/208; (IPC1-7): B01J17/12; H01L21/02