Document Type and Number:
Japanese Patent JPS5177078
Kind Code:
A
Inventors:
TSUDA AKITO
Application Number:
JP97575A
Publication Date:
July 03, 1976
Filing Date:
December 27, 1974
Export Citation:
Assignee:
SUWA SEIKOSHA KK
International Classes:
H01L27/00; H01L21/822; H01L27/04; (IPC1-7): H01L27/04
Domestic Patent References:
JP43001184A | ||||
JPS50148089A | 1975-11-27 |
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