Document Type and Number:
Japanese Patent JPS5179575
Kind Code:
A
Inventors:
KONNO RIICHI
IIJIMA MASATOSHI
IIJIMA MASATOSHI
Application Number:
JP10175A
Publication Date:
July 10, 1976
Filing Date:
January 06, 1975
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/027; G03C5/00; G03F1/00; G03F1/48; G03F1/54; G03F7/004; G03F9/00; H01L21/308; H05K3/00; (IPC1-7): G03C5/00; G03F9/00; H01L21/308; H05K3/00
Domestic Patent References:
| JPS4952977A | 1974-05-23 | |||
| JPS49131681A | 1974-12-17 |