- Patent JPS5180172

Document Type and Number:

Japanese Patent JPS5180172

Kind Code:

A

Inventors:

MOGI TOSHIJI
OKAMURA SHIMUYA
TANAKA RYUICHI

Application Number:

JP493475A

Publication Date:

July 13, 1976

Filing Date:

January 10, 1975

Export Citation:

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Assignee:

HITACHI LTD

International Classes:

H01L21/301; H01L21/302; H01L21/306; H01L21/329; H01L21/331; H01L29/06; H01L29/73; H01L29/74; (IPC1-7): H01L21/302; H01L29/06

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