Document Type and Number:
Japanese Patent JPS5180780
Kind Code:
A
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Inventors:
ITO TATSU
SUGAWARA KATSUO
SUGAWARA KATSUO
Application Number:
JP495975A
Publication Date:
July 14, 1976
Filing Date:
January 10, 1975
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L29/73; H01L21/302; H01L21/331; H01L29/04; H01L29/06; H01L29/861; (IPC1-7): H01L21/302; H01L29/04; H01L29/06
Domestic Patent References:
| JP46031929A |