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Document Type and Number:
Japanese Patent JPS5184569
Kind Code:
A
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Inventors:
SAITO TAI
HIROHATA SHIGEKI
Application Number:
JP875775A
Publication Date:
July 23, 1976
Filing Date:
January 22, 1975
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01J9/42; G01L21/00; G01L21/30; (IPC1-7): G01L21/00; H01J9/42



 
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