Document Type and Number:
Japanese Patent JPS5187976
Kind Code:
A
Inventors:
OOMURA KAZUMICHI
Application Number:
JP1187875A
Publication Date:
July 31, 1976
Filing Date:
January 30, 1975
Export Citation:
Assignee:
KOGYO GIJUTSUIN
International Classes:
H01L29/78; H01L21/265; H01L21/84; H01L29/36; H01L29/786; (IPC1-7): H01L21/265; H01L21/84; H01L29/36; H01L29/78
Domestic Patent References:
| JPS50139384A | 1975-11-07 |