Document Type and Number:
Japanese Patent JPS5187978
Kind Code:
A
Inventors:
KONISHI TOBUTAKE
YAO TSUTOMU
SUGAWARA YOSHITAKA
YAO TSUTOMU
SUGAWARA YOSHITAKA
Application Number:
JP1247175A
Publication Date:
July 31, 1976
Filing Date:
January 31, 1975
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L29/74; H01L29/747; H01L31/10; H01L31/111; (IPC1-7): H01L29/747; H01L31/10
Domestic Patent References:
| JPS4018658Y1 | ||||
| JP39025353A | ||||
| JP42017862A |