Document Type and Number:
Japanese Patent JPS5192182
Kind Code:
A
Application Number:
JP1706675A
Publication Date:
August 12, 1976
Filing Date:
February 10, 1975
Export Citation:
International Classes:
G01N23/225; B41F33/14; G01N23/20; H01L21/027; H01L21/66; (IPC1-7): G01N23/20
Domestic Patent References:
| JPS4318128Y1 | 1968-07-26 |