Document Type and Number:
Japanese Patent JPS52106301
Kind Code:
U
Application Number:
JP1279676U
Publication Date:
August 12, 1977
Filing Date:
February 06, 1976
Export Citation:
International Classes:
G03F7/20; (IPC1-7): G03F7/20
Domestic Patent References:
JPS5011396U | 1975-02-05 | |||
JP49133633B | ||||
JPS3012567Y1 | ||||
JP48113941B |