Document Type and Number:
Japanese Patent JPS52114670
Kind Code:
U
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Application Number:
JP2284276U
Publication Date:
August 31, 1977
Filing Date:
February 26, 1976
Export Citation:
International Classes:
H02H11/00; H01L21/822; H01L27/00; H01L27/04; H02H7/20; (IPC1-7): H01L27/00; H02H7/20