Document Type and Number:
Japanese Patent JPS52125451
Kind Code:
U
Application Number:
JP3383676U
Publication Date:
September 24, 1977
Filing Date:
March 19, 1976
Export Citation:
International Classes:
G01N21/88; G01B11/30; G01N21/956; H01L21/66; (IPC1-7): G01B11/30; H01L21/66