Document Type and Number:
Japanese Patent JPS52140771
Kind Code:
U
Application Number:
JP5082076U
Publication Date:
October 25, 1977
Filing Date:
April 20, 1976
Export Citation:
International Classes:
H01L23/34; H01L21/52; H01L23/12; H01L25/00; (IPC1-7): H01L25/00; H01L23/12; H01L23/34
Domestic Patent References:
| JPS4731064B1 |