Document Type and Number:
Japanese Patent JPS52141050
Kind Code:
U
More Like This:
WO/2003/016803 | CRYOGENIC CONDENSATION SYSTEM |
JPH08139389 | METHOD OF REFINING EXCIMER LASER GAS AND APPARATUS FOR PRODUCING THE SAME |
JPH08141305 | GAS TRAP |
Application Number:
JP5045676U
Publication Date:
October 26, 1977
Filing Date:
April 22, 1976
Export Citation:
International Classes:
B01D8/00; B01D7/02; B01D53/00; B01D53/34; B01D53/94; (IPC1-7): B01D53/00; B01D7/02; B01D53/34