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Document Type and Number:
Japanese Patent JPS52144664
Kind Code:
U
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Application Number:
JP5007076U
Publication Date:
November 02, 1977
Filing Date:
April 23, 1976
Export Citation:
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International Classes:
H01L21/673; H01L21/306; H01L21/68; (IPC1-7): H01L21/68
Domestic Patent References:
JPS508539U1975-01-29



 
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