Document Type and Number:
Japanese Patent JPS5222272
Kind Code:
Y2
Application Number:
JP49676U
Publication Date:
May 21, 1977
Filing Date:
January 07, 1976
Export Citation:
International Classes:
G02B7/00; G02B21/18; G02B27/02; G02B27/10; H01L21/60; H01L21/68; (IPC1-7): G02B27/02; G02B21/18; H01L21/60; H01L21/68