Document Type and Number:
Japanese Patent JPS5225784
Kind Code:
B2
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JP2018006616 | SUBSTRATE PROCESSING DEVICE |
Application Number:
JP6988275A
Publication Date:
July 09, 1977
Filing Date:
June 10, 1975
Export Citation:
International Classes:
B08B3/02; B08B3/00; B67C3/00