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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS5230884
Kind Code:
U
More Like This:
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WO/1992/018904PROCESS AND DEVICE FOR THE PHOTOLITHOGRAPHIC PRODUCTION OF LONG GRID SCALES
Application Number:
JP11322975U
Publication Date:
March 04, 1977
Filing Date:
August 15, 1975
Export Citation:
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International Classes:
G03F7/22; G03F7/12; (IPC1-7): G03F7/12



 
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