Document Type and Number:
Japanese Patent JPS5240550
Kind Code:
B2
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| JPS63236319 | MANUFACTURE OF SEMICONDUCTOR DEVICE |
Application Number:
JP8823271A
Publication Date:
October 13, 1977
Filing Date:
November 08, 1971
Export Citation:
International Classes:
H03F1/00; B32B15/085; H02H7/20; H04B1/16; (IPC1-7): H03F1/00; H02H7/20