Document Type and Number:
Japanese Patent JPS5270313
Kind Code:
U
Application Number:
JP15816475U
Publication Date:
May 25, 1977
Filing Date:
November 21, 1975
Export Citation:
International Classes:
B05B17/06; B06B1/06; H01L41/00; (IPC1-7): B05B17/06; B06B1/06; H01L41/00
Domestic Patent References:
| JP50137610B | ||||
| JP50116103B | ||||
| JP50104208B | ||||
| JP50099759B | ||||
| JP37000516A | ||||
| JP36009183A |
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