Document Type and Number:
Japanese Patent JPS5276076
Kind Code:
U
Application Number:
JP16293175U
Publication Date:
June 07, 1977
Filing Date:
December 05, 1975
Export Citation:
International Classes:
B65G47/94; (IPC1-7): B65G47/94
Domestic Patent References:
| JPS4833573A | 1973-05-11 |
Foreign References:
| US3010587A | 1961-11-28 |
Previous Patent: METHOD OF MEASURING FLOW RATE
Next Patent: EXPOSURE NUMBER COUNTING DEVICE FOR ELECTRON BEAM EXPOSURE APPARATUS
Next Patent: EXPOSURE NUMBER COUNTING DEVICE FOR ELECTRON BEAM EXPOSURE APPARATUS