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Document Type and Number:
Japanese Patent JPS5281060
Kind Code:
U
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Application Number:
JP16943775U
Publication Date:
June 16, 1977
Filing Date:
December 15, 1975
Export Citation:
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International Classes:
H01L21/768; H01L21/302; H01L21/306; H01L23/522; (IPC1-7): H01L21/302; H01L21/88



 
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