Document Type and Number:
Japanese Patent JPS53124647
Kind Code:
U
Application Number:
JP2960177U
Publication Date:
October 04, 1978
Filing Date:
March 14, 1977
Export Citation:
International Classes:
H01L21/52; H01L21/58; H01L23/02; H01L23/12; (IPC1-7): H01L23/12; H01L21/58; H01L23/02
Domestic Patent References:
| JPS4951872A | 1974-05-20 |
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