Document Type and Number:
Japanese Patent JPS5312612
Kind Code:
U
Application Number:
JP9442176U
Publication Date:
February 02, 1978
Filing Date:
July 15, 1976
Export Citation:
International Classes:
B05B17/06; B05B1/06; B06B1/06; H01L41/00; (IPC1-7): B05B17/06; B05B1/06; H01L41/00
Domestic Patent References:
JP50100107B |
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