Document Type and Number:
Japanese Patent JPS5315765
Kind Code:
U
Application Number:
JP9652676U
Publication Date:
February 09, 1978
Filing Date:
July 20, 1976
Export Citation:
International Classes:
H01L23/32; H01L23/02; H01L23/04; H01L23/34; H01L23/48; (IPC1-7): H01L23/48; H01L23/02; H01L23/34
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