Document Type and Number:
Japanese Patent JPS5317176
Kind Code:
U
Application Number:
JP9890376U
Publication Date:
February 14, 1978
Filing Date:
July 22, 1976
Export Citation:
International Classes:
G09F13/20; G09F9/00; H01L21/60; H01L23/12; H01L23/48; H01L33/30; H01L33/36; H01L33/62; (IPC1-7): H01L33/00; G09F9/00; H01L21/60; H01L23/12