Document Type and Number:
Japanese Patent JPS5317869
Kind Code:
B1
More Like This:
JP4788749 | Semiconductor device |
JPS5743439 | SELECTIVE OXIDATION ISOLATION TYPE SEMICONDUCTOR DEVICE |
JPS57197820 | MANUFACTURE OF SEMICONDUCTOR DEVICE |
Application Number:
JP4352271A
Publication Date:
June 12, 1978
Filing Date:
June 16, 1971
Export Citation:
International Classes:
H01L21/76; (IPC1-7): H01L21/76