Document Type and Number:
Japanese Patent JPS5318277
Kind Code:
Y2
Application Number:
JP7296872U
Publication Date:
May 16, 1978
Filing Date:
June 20, 1972
Export Citation:
International Classes:
G01L1/18; G01L9/00; G01L9/06; H01H35/00; H01H35/34; H01L29/84; H01L31/10; (IPC1-7): H01L29/84; G01L9/00; H01H35/00