Document Type and Number:
Japanese Patent JPS5323071
Kind Code:
B2
Application Number:
JP4532675A
Publication Date:
July 12, 1978
Filing Date:
April 16, 1975
Export Citation:
International Classes:
H01L27/04; H01L21/822; H01L21/8247; H01L29/78; H01L29/788; H01L29/792