Document Type and Number:
Japanese Patent JPS5335403
Kind Code:
Y2
Application Number:
JP1488673U
Publication Date:
August 30, 1978
Filing Date:
February 02, 1973
Export Citation:
International Classes:
C30B25/02; C21D1/00; F27B5/00; H01L21/205; H01L21/22; H01L21/223; H01L21/31; H01L21/68; (IPC1-7): H01L21/205; B01J17/32; C21D1/00; F27B5/00; H01L21/223; H01L21/31; H01L21/68