Document Type and Number:
Japanese Patent JPS5341518
Kind Code:
B1
Application Number:
JP2919171A
Publication Date:
November 04, 1978
Filing Date:
April 30, 1971
Export Citation:
International Classes:
H01L21/208; H01L33/08; H01L33/30; H01L33/40; (IPC1-7): H01L33/00; H01L21/208