Document Type and Number:
Japanese Patent JPS5349482
Kind Code:
U
Application Number:
JP13055076U
Publication Date:
April 26, 1978
Filing Date:
September 30, 1976
Export Citation:
International Classes:
G01L21/32; C23C14/54; G01N27/62; H01L21/203; H01L21/363; (IPC1-7): G01N27/62; C23C13/00; G01L21/32; H01L21/203; H01L21/363