Document Type and Number:
Japanese Patent JPS5352385
Kind Code:
Y2
Application Number:
JP6086177U
Publication Date:
December 14, 1978
Filing Date:
May 12, 1977
Export Citation:
International Classes:
H01L25/18; H01L21/58; H01L21/60; H01L23/12; H01L23/50; H01L23/52; H01L25/065; H01L25/07; H01L27/00; H05K1/00; (IPC1-7): H01L23/12; H01L21/58; H01L21/60