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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS5355470
Kind Code:
U
More Like This:
Application Number:
JP13661976U
Publication Date:
May 12, 1978
Filing Date:
October 13, 1976
Export Citation:
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International Classes:
G03F1/00; G03F1/22; H01L21/027; H01L21/302; (IPC1-7): H01L21/302; G03F1/00
Domestic Patent References:
JPS4882778A1973-11-05