Document Type and Number:
Japanese Patent JPS5371615
Kind Code:
U
Application Number:
JP15421376U
Publication Date:
June 15, 1978
Filing Date:
November 16, 1976
Export Citation:
International Classes:
C23C8/26; D04B15/00; D04B35/04; (IPC1-7): C23C9/10; C23C11/14; D04B15/00