Document Type and Number:
Japanese Patent JPS5398780
Kind Code:
U
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Application Number:
JP254177U
Publication Date:
August 10, 1978
Filing Date:
January 14, 1977
Export Citation:
International Classes:
H01J61/09; G01N21/00; H01J61/10; (IPC1-7): H01J61/10; G01N21/00