Document Type and Number:
Japanese Patent JPS54100559
Kind Code:
U
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Application Number:
JP17904977U
Publication Date:
July 16, 1979
Filing Date:
December 26, 1977
Export Citation:
International Classes:
H01L21/673; H01L21/22; H01L21/68; (IPC1-7): H01L21/22; H01L21/68